Spectroscopic instruments. VI. Vacuum ultraviolet spectrometer.
نویسندگان
چکیده
منابع مشابه
Spectroscopic characterization of vacuum ultraviolet free electron laser pulses.
Because of the stochastic nature of self-amplified spontaneous emission (SASE), it is crucial to measure for single pulses the spectral characteristics of ultrashort pulses from the vacuum ultraviolet free electron laser (FLASH) at DESY, Germany. To meet this particular challenge, we have employed both photon and photoelectron spectroscopy. Each FEL pulse is composed of an intense and spectrall...
متن کاملProgress in spectroscopic ellipsometry: Applications from vacuum ultraviolet to infrared
Spectroscopic ellipsometry ͑SE͒ is a noncontact and nondestructive optical technique for thin film characterization. In the past 10 yr, it has migrated from the research laboratory into the semiconductor, data storage, display, communication, and optical coating industries. The wide acceptance of SE is a result of its flexibility to measure most material types: dielectrics, semiconductors, metals...
متن کاملAn Extreme Ultraviolet Spectrometer
A concept and preliminary design of an Extreme Ultraviolet (EUV) spectrometer is presented. The spectrometer is based on a gas ionization chamber and an advanced eight-electrode electron focusing system to form a narrow electron beam on a photodiode aperture. The design is modeled with the SIMulation of IONs (SIMION) tools and shows the ability to scan through the spectral range of 20.0 – 40.6 ...
متن کاملA simple electron time-of-flight spectrometer for ultrafast vacuum ultraviolet photoelectron spectroscopy of liquid solutions.
We present a simple electron time of flight spectrometer for time resolved photoelectron spectroscopy of liquid samples using a vacuum ultraviolet (VUV) source produced by high-harmonic generation. The field free spectrometer coupled with the time-preserving monochromator for the VUV at the Artemis facility of the Rutherford Appleton Laboratory achieves an energy resolution of 0.65 eV at 40 eV ...
متن کاملOptical characterization in the vacuum ultraviolet with Variable Angle Spectroscopic Ellipsometry: 157 nm and below
As device feature sizes shrink below 0.18 μm, shorter wavelength exposure tools are being investigated to meet the requirements for higher resolution. Understanding the optical properties of thin films and substrate materials at short wavelengths (193 nm, 157 nm, and shorter) will be necessary to develop the lithographic process. Variable Angle Spectroscopic Ellipsometry (VASE) offers nondestru...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of the Spectroscopical Society of Japan
سال: 1985
ISSN: 1884-6785,0038-7002
DOI: 10.5111/bunkou.34.392